#FORMAT	     : EMSA/MAS Spectral Data File
#VERSION     : 1.0
#TITLE       : Si3N4_Si_L3_Lingyang_Li_166
#DATE        : 
#TIME        : 
#OWNER       : eelsdatabase.net
#NPOINTS     : 1340
#NCOLUMNS    : 1
#XUNITS      : eV
#YUNITS      : 
#DATATYPE    : XY
#XPERCHAN    : 0.5
#OFFSET      : 5.000000e+001
#SIGNALTYPE  : ELS
#SPECTRUM    : Spectral Data Starts Here
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#ENDOFDATA   : End Of Data and File